| 摘要 |
PROBLEM TO BE SOLVED: To provide an amorphous hydrocarbon-based film achieving a low friction coefficient, and to provide a slide member and a slide system, capable of reducing a friction coefficient on a slide surface without using a lubricant separately.SOLUTION: A low friction coating film 5 contains an aliphatic hydrocarbon group showing a peak in a region of 2,900-3,000 cmin an infrared absorption spectrum, a carbonyl group showing a peak in a region of 1,650-1,800 cmin the infrared absorption spectrum, and an aromatic component (CH) showing a peak at a mass of 91.1 and a condensed ring-based component (CH) showing a peak at a mass of 115.2 in a positive ion spectrum obtained by TOF-SIMS.SELECTED DRAWING: Figure 1 |
