METHOD AND DEVICE FOR LASER CVD,申请号JP19890078565-传众专利搜索

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发明名称	METHOD AND DEVICE FOR LASER CVD
摘要
申请公布号	JPH02260527(A)	申请公布日期	1990.10.23
申请号	JP19890078565	申请日期	1989.03.31
申请人	NEC CORP	发明人	KUSUMI YOSUKE;YOSHINO YOICHI
分类号	H01L21/205;H01L21/263;H01L21/268;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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