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发明名称
摘要
申请公布号	JPH02142534(U)	申请公布日期	1990.12.04
申请号	JP19890010335U	申请日期	1989.01.30
申请人		发明人
分类号	H01L21/52;(IPC1-7):H01L21/52	主分类号	H01L21/52
代理机构		代理人
主权项
地址

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