ELECTRICALLY CONDUCTIVE CERAMICS AND ITS USE

摘要

PURPOSE:To obtain electrically conductive ceramics fit to produce a heating element (boat) for evaporating a metal having a long service life and to produce such a heating element. CONSTITUTION:A coating layer contg. aluminum nitride and yttria is formed on the surface of an electrically conductive ceramic sintered compact contg. boron nitride, titanium diboride and aluminum nitride to obtain the objective electrically conductive ceramics. The cavitied part of an electrically conductive ceramic boat is made of the electrically conductive ceramics to obtain the objective heating element for evaporating a metal. A deformed article of the heating element is also obtd.