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发明名称
摘要
申请公布号	JP2576165(B2)	申请公布日期	1997.01.29
申请号	JP19870303538	申请日期	1987.11.30
申请人	NIPPON ELECTRIC CO	发明人	SHIMAWAKI HIDENORI
分类号	H01L29/73;H01L21/285;H01L21/331;H01L29/205;H01L29/72;H01L29/737;(IPC1-7):H01L21/331	主分类号	H01L29/73
代理机构		代理人
主权项
地址

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