| 摘要 |
PROBLEM TO BE SOLVED: To reduce a dead volume between a micro-valve and a reaction chamber. SOLUTION: A reaction chamber 22 is formed as a cavity bored through a substrate 20 and its upper part is provided with a remaining portion 32 partly left without being etched of a surface portion of the substrate 20. A micro-valve 34 is formed on the remaining portion 32 to control the introduction of a specimen from a specimen introduction passage 28 while a fluid supply port 36 into the reaction chamber 22 is formed as a vertical hole in the remaining portion 32. When introducing the specimen into the reaction chamber 22, the specimen supplied from the introduction passage 28 is introduced into the reaction chamber 22 from the supply port 36 with air pressure prevented from being applied to an air chamber on a diaphragm 34a by the micro-valve 34. The supply port 36 is closed by the diaphragm 34a after introducing the specimen into the reaction chamber 22. COPYRIGHT: (C)2005,JPO&NCIPI
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