AIR CONDITIONING SYSTEM FOR SEMI-CONDUCTOR OR DISPLAY MANUFACTURING PROCESS AND INNER FILTER UNIT OF THE AIR CONDITIONING SYSTEM

摘要

An air conditioning system for a fabrication of semiconductor or display and an inner-air filter unit are provided to prevent a blur problem of a substrate due to decreased illumination by decreasing density of organic compound. An outer-air filter unit(110) is connected to an inflow duct(101) to eliminate contaminants contained in outer air. The outer-air filter unit is connected to a confluent part(103) via a coupling duct(102), and the outer air is mixed with inner air in the confluent part. An inner-air filter unit(120) is connected to a confluent part to eliminate contaminants contained in the inner air. An inner-air duct(107) is connected to the inner-air filter unit to guide the inner air into the inner-air filter unit. A pre-filter(105) is installed at an inlet port of a working area(106) to eliminate particle material contained in the air.