MANUFACTURING METHOD OF TASI2-SI3N4 NANOCOMPOSITE COATING

摘要

A new TaSi2-Si3N4 nanocomposite coating layer formed on a surface of tantalum or tantalum alloys is provided to improve isothermal oxidation resistance and repeated oxidation resistance of the coating layer at high temperatures and improve mechanical properties of the coating layer at high temperatures, and a manufacturing method of the nanocomposite coating layer is provided. A manufacturing method of a TaSi2-Si3N4 nanocomposite coating layer comprises the steps of: (a) simultaneously vapor-depositing tantalum and nitrogen onto a surface of tantalum or tantalum alloys as a matrix to form a TaN coating layer on the surface of the matrix, and forming a Ta2N coating layer on the TaN coating layer; and (b) vapor-depositing silicon onto the surface of the tantalum nitride coating layer to form a TaSi2-(28.4-11.7) vol.% Si3N4 nanocomposite coating layer, wherein the nanocomposite coating layer is gradient structured such that the Si3N4 volume fraction of the nanocomposite coating layer is reduced as it goes from the matrix side to the surface side.