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发明名称
METHOD AND DEVICE FOR REMOVING CONTAMINATION ON SOLID SURFACE
摘要
申请公布号
JPS60135796(A)
申请公布日期
1985.07.19
申请号
JP19830243348
申请日期
1983.12.23
申请人
HITACHI SEISAKUSHO KK
发明人
HIROSE YASUO
分类号
G21F9/28;B08B7/00;G21F9/00
主分类号
G21F9/28
代理机构
代理人
主权项
地址
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