| 摘要 |
PROBLEM TO BE SOLVED: To support an oscillator in the direction of relative motion, removing its backlash, and facilitating performing the setup work of a pressurizing part and a support. SOLUTION: This actuator is equipped with an oscillator 100, a relative motion member 110 which performs motion relative the oscillator 110 in pressure contact with the oscillator 100, a support 24 which regulates the position in the direction of the above relative motion and also supports the oscillator 100 free of displacement roughly in parallel with the direction of pressurization, pressurization parts 21, 22, and 23d which pressurize the oscillator 100 via the support 24, and setup parts 25 and 24f where the support 24 and the pressurizing part 21 are set up integrally. |
