COIL COMPONENT MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coil component which can be improved in the accuracy of an inductor with no decline in reliability without using an etchant, and to provide its manufacturing method. SOLUTION: The formation of the coil component comprises processes of coating the surface 7 of an elemental body 1 consisting of a polyimide film by an insulator to form an insulator layer 2, removing the insulator layer 2 into a helical pattern to form a helical groove 8 in the insulator layer 2, and placing a conductor 3 in the helical groove 8. The helical groove 8 of the insulator layer 2 is formed by a photolithography process. The conductor 3 placed in the helical groove 8 fills up the helical groove 8 while at the same time coating the insulator 2. The conductor 3 coating the surface 7 of the insulator 2 is removed to form the coil component. COPYRIGHT: (C)2005,JPO&NCIPI