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发明名称
Verfahren zum Trennen von Platten, die miteinander geklebt sind und eine gestapelte Struktur bilden
摘要
申请公布号
DE602004001948(T2)
申请公布日期
2007.08.30
申请号
DE200460001948T
申请日期
2004.09.23
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
MORICEAU, HUBERT;FOURNEL, FRANCK;ASPAR, BERNARD
分类号
B26F3/00;H01L27/12;B26D7/14;B32B37/00;B32B43/00;H01L21/00;H01L21/02;H01L21/20;H01L21/30;H01L21/304;H01L21/44;H01L21/46;H01L21/762
主分类号
B26F3/00
代理机构
代理人
主权项
地址
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