| 摘要 |
PURPOSE: A road port for FOUP(Front Opening Unified Pod) is provided to prevent over-driving of a latch key by sensing overload of a motor to generate interlock. CONSTITUTION: A road port includes a latch key inserted in a latch hole located at a door of a wafer transport box, a driving motor(138) for driving the latch key, a measurement part(144) for measuring the current of the driving motor, and a controller(146). If the measured value from the measurement part is exceeded to a predetermined reference value, the controller generates interlock.
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