发明名称 Non-volatile memory cell and fabricating method thereof and method of fabricating non-volatile memory
摘要 A method of fabricating a non-volatile memory is provided. In the fabricating method, a plurality of stack gate structures is formed on a substrate and a plurality of doped regions is formed in the substrate beside the stack gate structures. Then, a plurality of spacers is formed on the sidewalls of the stack gate structures. After that, a plurality of conductive pad layers is formed on the exposed doped regions. By forming the conductive pad layers, the resistance of the doped region in each memory cell can be reduced.
申请公布号 US7271062(B2) 申请公布日期 2007.09.18
申请号 US20050223690 申请日期 2005.09.09
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 WENG MENG-HSUAN;HAN TZUNG-TING;CHEN MING-SHANG
分类号 H01L21/336 主分类号 H01L21/336
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