METHOD FOR PRODUCING AIR GAP USING NANOTUBE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing air gaps using nanotubes.

SOLUTION: A target layer (4) comprising at least one degradable material (5) is deposited on a support (1). Then, nanotubes (6) are formed on the degradable material (5) of the target layer (4) before deposition of an insulating layer (7) is performed. Degradation of the degradable material (5) and elimination of degradation sub-products are then performed by means of the nanotubes (6) passing through the insulating layer (7) thus forming air gaps (10) in the target layer (4).

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