| 摘要 |
PROBLEM TO BE SOLVED: To detect a mounted state of a workpiece like a substrate more precisely to inhibit breakage with a higher probability, in a device for processing a semiconductor wafer, etc. SOLUTION: The device has a plurality of lift pins 4 each connected to a load sensor 5 and the mounted state of a substrate is evaluated by processing the values of the load with an operation unit 6. This arrangement clearly and precisely detects a displacement or removal of the substrate, thereby reducing the possibility of a substrate breakage. COPYRIGHT: (C)2009,JPO&INPIT
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