| 主权项 |
1. A sound transducer comprising:
a substrate having a first surface and a second surface, the first surface defining a first plane, the substrate having a cavity with an interior peripheral edge, the cavity extending from the first surface; a body having an exterior peripheral edge, the body being parallel to the first plane and at least partially covering the cavity, the body being connected to the substrate by at least one resilient hinge; a first set of comb fingers mounted to the substrate, the first set of comb fingers being connected to a first electrical connection; and a second set of comb fingers mounted to the body and extending past the exterior peripheral edge of the body, the second set of comb fingers being connected to a second electrical connection that is isolated from the first electrical connection, wherein the first set of comb fingers and the second set of comb fingers are interdigitated and configured to create an electrostatic force driving the body in a direction perpendicular to the first plane, wherein the body and the at least one resilient hinge are configured for a resonant or a near-resonant excitation by the electrostatic force, wherein the body and the at least one resilient hinge form a resonating structure, and wherein the first set of comb fingers and the second set of comb fingers are configured to drive the resonating structure, during an operation of the sound transducer, in a substantially permanent resonant or near-resonant excitation and to amplitude-modulate a resulting oscillation of the body at or near a resonant frequency of the resonating structure with a control signal that is based on an electrical input signal to be transduced by the sound transducer. |
