| 摘要 |
PROBLEM TO BE SOLVED: To suppress the deterioration of productivity of substrate processing, by exchanging and using opposite members.SOLUTION: A substrate processing device 1 is equipped with a substrate holding portion 31 which holds a substrate 9; a top plate 51 which opposes to an upper surface of the substrate 9; an opposite member storing portion 81 capable of storing top plates 51 and 51a; and an opposite member holding portion moving mechanism 57 which carries the top plates 51 and 51a between an upper side of the substrate holding portion 31 and the opposite member storing portion 81. In the substrate processing device 1, the top plate 51 is carried from the substrate 9 and the upper side of the substrate holding portion 31 and carried to the opposite member storing portion 81 by the opposite member holding portion moving mechanism 57, and the other top plate 51a stored in the opposite member storing portion 81 is taken out and carried to the substrate 9 and the upper side of the substrate holding portion 31. Therefore, at one substrate processing device 1, the top plates can be exchanged and used.SELECTED DRAWING: Figure 3 |
