| 摘要 |
<p>PURPOSE:To provide a semiconductor aligner capable of easily using and managing wafer information, without using a large-scale and complicated information transmission network. CONSTITUTION:The title aligner is equipped with the following; a wafer cassette 11 for accommodating a wafer to be exposed, an XYtheta stage 16 which mounts the wafer when it is exposed, and a wafer conveying system 17 which carries wafers between the wafer cassette 17 and the XYtheta stage 16. The wafer cassette 11 is equipped with a nonvolatile storage means 12. A reading/writing means 10 for writing information on the storage means 12 and reading information from the storage means 12 is provided.</p> |
