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发明名称
INSPECTION METHOD AND INSPECTION DEVICE
摘要
申请公布号
JPH07128243(A)
申请公布日期
1995.05.19
申请号
JP19930274336
申请日期
1993.11.02
申请人
SEKISUI CHEM CO LTD
发明人
SHIMIZU HARUKAZU
分类号
G01N21/88;G01N21/958;G06T1/00;G06T7/00;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
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