SIMPLIFIED ELECTRONIC ACCELERATION TYPE PLASMA GENERATING METHOD,申请号JP19950161350-传众专利搜索

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发明名称	SIMPLIFIED ELECTRONIC ACCELERATION TYPE PLASMA GENERATING METHOD
摘要
申请公布号	JPH08319561(A)	申请公布日期	1996.12.03
申请号	JP19950161350	申请日期	1995.05.24
申请人	URAMOTO JOSHIN	发明人	URAMOTO JOSHIN
分类号	H05H1/48;C23C14/30;C23C16/50;H05H1/54;(IPC1-7):C23C14/30	主分类号	H05H1/48
代理机构		代理人
主权项
地址

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