OPTICAL WAVEGUIDE DEVICES AND METHODS OF FABRICATING THE SAME

摘要

The present invention concerns an optical waveguide device having a structure for effectively suppressing variation in optical characteristics due to temperature change without causing increase in device size, and a fabrication method thereof. The optical waveguide device has a structure in which a first main member having a positive coefficient of linear expansion is fixed to a sub member having a negative coefficient of linear expansion. The first main member is provided with an undercladding, a core functioning as an optical waveguide provided on a plane of the undercladding, and an overcladding provided so as to cover the core between the undercladding and the overcladding. The first main member is made, for example, of a silica glass or silicon based material and the core is doped with a dopant for increasing the refractive index. While covering the whole of at least one major surface of the first main member, the sub member is fixed to the major surface.