| 摘要 |
PROBLEM TO BE SOLVED: To provide a guide device, which makes an ultrasonic motor as the drive source for a stage 13, with which not only positioning accuracy for the stage 13 but also accuracy of the position of the stage 13 in moving can be easily grasped. SOLUTION: In the guide device, which has the ultrasonic motor 15; the stage 13 which is movable by friction drive with the ultrasonic motor 15; a position detection means 16 for the stage 13; a driving-force control part 10 which outputs an instruction signal for drive to the ultrasonic motor 15 by calculating based on the deviation between the position information of the position detection means 16 and a preliminarily set criterion-position information, a monitoring part 17 is provided to monitor in time-series the changing rate in the servo-loop and the deviation of instruction signals outputted from the driving-force control part 10, respectively. |
