DEVICE AND METHOD FOR PREPARING EVALUATION SAMPLE OF INORGANIC MATERIAL USED FOR POLYCRYSTALLINE SILICON MANUFACTURING APPARATUS, AND METHOD FOR EVALUATING SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a device and method for preparing an evaluation sample of an inorganic material in order to select the inorganic material having less impurities mixed into a polycrystalline silicon obtained as a member of a polycrystalline silicon manufacturing apparatus in the manufacturing of the polycrystalline silicon by the Siemens method, and a method for evaluating the sample.SOLUTION: The device for preparing an evaluation sample of an inorganic material used for a polycrystalline silicon manufacturing apparatus by the Siemens method comprises: inorganic material support means for supporting an inorganic material to be evaluated; an inorganic material heating unit including heating means; a reaction chamber including the heating means and silicon core wire support means for supporting a silicon core wire for depositing a single crystal silicon; a raw material gas supply port for supplying a raw material gas to the inorganic material heating unit; and supply means. The inorganic material heating unit is included between the raw material gas supply port and the reaction chamber.SELECTED DRAWING: Figure 1