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发明名称
SURFACE INSPECTING METHOD USING IMAGE PICKUP DEVICE
摘要
申请公布号
JPS6396542(A)
申请公布日期
1988.04.27
申请号
JP19860242379
申请日期
1986.10.13
申请人
NIPPON STEEL CORP
发明人
MOTOMURA MASAKI
分类号
G01N21/88;G01N21/89;G01N21/892
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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