Substrate separating apparatus and method, and substrate manufacturing method,申请号EP19990307446-传众专利搜索

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发明名称	Substrate separating apparatus and method, and substrate manufacturing method
摘要
申请公布号	EP0989593(A3)	申请公布日期	2002.01.02
申请号	EP19990307446	申请日期	1999.09.21
申请人	CANON KABUSHIKI KAISHA	发明人	OHMI, KAZUAKI;YONEHARA, TAKAO;SAKAGUCHI, KIYOFUMI;YANAGITA, KAZUTAKA
分类号	H01L21/20;H01L21/00;H01L21/673;H01L21/762;(IPC1-7):H01L21/00	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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