| 摘要 |
PROBLEM TO BE SOLVED: To reduce the exposure time by providing a sensitivity control part for making the sensitivity of a servo control part lower or zero during the non-exposure time. SOLUTION: When information of a non-exposure time start is input from a central control part to a sensitivity control part 17, a gain constant of a servo control part 15 is made smaller. As a result, even if a stage begins to move and thus the whole of an exposure apparatus vibrates, actuators 12 (12X, 12Y, 12Z) do not react excessively or at all to that vibration, and a reticle R remains in the vicinity of a standard position. When information of a non- exposure time end is input to the sensitivity control part 17, the gain constant of the servo control part 15 is returned to the original value. A dislocation amount detected by detection parts 14A, 14B is input to the servo control part 15 and signals are output therefrom to the actuators 12 to position the reticle R at the standard position. The reticle R is returned to the standard position in a short time, because it is in the vicinity of the standard position. In the subsequent exposure, the stage is stationary and there is no vibration of the whole exposure apparatus so that no vibration of the reticle is generated. |
