发明名称 SAMPLE TABLE FOR ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a sample table for an electron microscope causing no burying of a microstructure of a biological sample and damage of the sample, and having stable electric conductivity and surface roughness. SOLUTION: In this sample table for the electron microscope, surface roughness of a surface is set to 0.05 to 1.0μm in arithmetical mean roughness Ra stipulated in JIS B 0601.
申请公布号 JP2002164012(A) 申请公布日期 2002.06.07
申请号 JP20000356888 申请日期 2000.11.24
申请人 HITACHI CHEM CO LTD 发明人 SAITO SHOICHI;YAGIOKA KATSUAKI
分类号 H01J37/20;(IPC1-7):H01J37/20 主分类号 H01J37/20
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