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发明名称
ION SOURCE
摘要
申请公布号
JPH10162747(A)
申请公布日期
1998.06.19
申请号
JP19960317630
申请日期
1996.11.28
申请人
FUJITSU LTD
发明人
SATO MITSUHIRO
分类号
H01J27/08;H01J37/08;(IPC1-7):H01J27/08
主分类号
H01J27/08
代理机构
代理人
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