发明名称 MANUFACTURING METHOD OF SURFACE LIGHT-EMISSION TYPE SEMICONDUCTOR LASER
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a surface light-emission type semiconductor laser wherein the occurrence of interface levels between an embedded layer and an active layer is suppressed or reduced. SOLUTION: This method of manufacturing the layer comprises a process of forming a plurality of semiconductor layers on a substrate 102, a process of forming at least one pillar-like semiconductor layer by etching layer part of the semiconductor layer including at least a clad layer 105 using a mask 113, a process of epitaxially growing a II-VI compound semiconductor around the pillar-like semiconductor layer to form an embedded layer 109, and a process of rinsing the layer surface before the process of forming the embedded layer 109.
申请公布号 JP2002158401(A) 申请公布日期 2002.05.31
申请号 JP20010291513 申请日期 2001.09.25
申请人 SEIKO EPSON CORP 发明人 MORI KATSUMI
分类号 H01L21/308;H01L21/205;H01S5/183;(IPC1-7):H01S5/183 主分类号 H01L21/308
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