发明名称 CHEMISCHE DAMPFABSCHEIDUNG UNTER VERWENDUNG VON EINEM JODIDVORLÄUFER
摘要 The present invention discloses a CVD (Chemical Vapor Deposition) process where nickel or alloys thereof, such as, Ni/Cu, Ni/Co, are deposited on metal surfaces (32, 34) which are capable of receiving nickel or alloys thereof, using an Iodide source (23), preferably an Iodide salt, such as, Copper Iodide. <IMAGE>
申请公布号 AT209263(T) 申请公布日期 2001.12.15
申请号 AT19970304018T 申请日期 1997.06.10
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 REDDY, SRINIVASA S.N.;KNICKERBOCKER, JOHN ULRICH;WALL, DONALD RENE
分类号 C23C16/08;C23C16/44;H01L21/28;H01L21/285;H05K3/24;(IPC1-7):C23C16/08 主分类号 C23C16/08
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