| 摘要 |
PROBLEM TO BE SOLVED: To make data analysis to be used not only in a clean room by using a media in which the record of error information or production information is exchanged and carried easily, by storing the entire record of many error information and production information, extending memory areas for the error information and the production information, and improving the function of the media by the extension of a system parameter. SOLUTION: In the method of data analysis, error information that is generated, or the production information including a recipe or the like is directly recorded in an external storage media 12, while the error information and the production information are accessed to form the external storage media 12. COPYRIGHT: (C)2009,JPO&INPIT
|
