| 摘要 |
PROBLEM TO BE SOLVED: To suppress changes in the characteristics of other films by a forming step of an inorganic insulating film which is used in a storage capacitor, in a liquid crystal display. SOLUTION: I a liquid crystal interposed between a pair of substrates opposed to each other in the liquid crystal display, of the manufacturing procedure for the element substrate of the pair of substrates, a transistor which is to serve as a pixel TFT is formed on a light transmissive substrate, then formation of an interlayer insulating film, extraction of source and drain electrodes, formation of a passivation film (PV film), formation of a planarization film and formation of a pixel electrode to be the lower electrode are performed (S10, 12, 14 and 16); and then the FFS insulating film to be the inorganic film is film-deposited (S18) under conditions that satisfy the planarization film not deteriorating and the pixel electrode which is to serve as the lower electrode does not deteriorate. After that, formation of a common electrode which is to serve as the upper electrode and formation of an alignment layer are performed, and the element substrate is obtained. COPYRIGHT: (C)2009,JPO&INPIT |
