| 摘要 |
PURPOSE:To allow the long-term maintenance of the accuracy of processing positions and the adjustment of a processing focus without actually processing a processing sample. CONSTITUTION:A processing optical system 16 is constituted of a visible light source 17, a member 19 having an aperture 18 disposed in front of this visible light source 17, an imaging lens 20 disposed in front of this aperture 18, an objective lens 21 for processing, and a lifting mechanism 22 for lifting this objective lens 21 for processing. An observation optical system 23 is imposed via a 2nd X-Y stage 24 on a frame 13 and is provided with an objective lens 25 for observation. A controller 26 is connected to this 2nd X-Y stage 24 to control the driving of the 2nd X-Y stage 24. |
