| 摘要 |
<p>PURPOSE: To provide a substrate drawing out/containing device and a substrate transfer device which ensure drawing out operation of a substrate from a cassette by preventing the cassette from rising and a substrate pad to be used for each device. CONSTITUTION: Receiving grooves 40d, 40e, etc., for receiving a substrate provided parallel to a substrate pad 40 which is made to pass through in a cassette and thereby draws out a substrate from a cassette are divided into a plurality of division parts 41 to 45 in a substrate alignment direction and is formed to have a step between division parts mutually. Thereby, the number of substrates to be raised simultaneously is reduced and friction force generated between a substrate and a cassette is also relaxed.</p> |
