| 摘要 |
<p>PROBLEM TO BE SOLVED: To inspect a liquid crystal panel with improved detection level and S/N, at high precision. SOLUTION: On a substrate 4, a thin-type array sensor 1 and an amplifier and scanner 2 are provided. In addition, at an end part of the substrate 4, a plurality of step-like notches 6 re formed. With a lead-out electric line 3 formed by metal film forming, an array sensor 2, the amplifier and scanner 2, and the notch 6 are wired together. Since the array sensor 1 and the amplifier and scanner 2 as well as the electric line 3, are thin, the array sensor 1 is allowed to be close to a liquid crystal panel which is to be inspected. Further, through the lead-out electric line 3 of the notch 6, signal is easily taken out.</p> |
