| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma processing detection indicator of good heat resistance having a discoloration layer discoloring by plasma processing, where gasification or scattering as fine debris of the discoloration layer by plasma processing is suppressed to the extent not adversely affecting the electronic device characteristics.SOLUTION: In a plasma processing detection indicator having a discoloration layer discoloring by plasma processing, the discoloration layer contains metal oxide particulates having an average particle size of 50 μm or less containing at least one kind of element selected from a group consisting of mo, W, Sn, V, Ce, Te and Bi.SELECTED DRAWING: None |
