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发明名称
DEBURRING DEVICE
摘要
申请公布号
JPH03159140(A)
申请公布日期
1991.07.09
申请号
JP19890297323
申请日期
1989.11.17
申请人
HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD
发明人
AOYAMA TAKAMITSU;KOMATSU MINORU
分类号
H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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