| 摘要 |
PROBLEM TO BE SOLVED: To provide an electroluminescent element with improved reliability. SOLUTION: An upper electrode 40 of the EL element is covered with a first protective film 50 including a dense CuPc film having high covering properties, which can be formed by vacuum evaporation method, superior in sputter resistant properties and plasma resistant properties, and a second protection film 60 constituted mainly of inorganic material like SiNx, is formed on the first protective film so as to cover the whole part of a substrate. Although the protective film made of inorganic material is superior in waterproofing properties and mechanical strength, as it is formed by sputtering or CVD, there is the possibility of damaging the lower metallic layer or further lower light-emitting later 30 during film formation, and such a damage can be protected by the first protective film 50, including the CuPc film. Since the CuPc film is soft and provided with stress relaxation properties, the surface is prevented from generation of hillocks or the like, caused by heating even when an upper electrode 40 is formed of Al or the like. A laminated structure, interposing a buffer layer, may be adopted as the upper electrode 40. COPYRIGHT: (C)2006,JPO&NCIPI
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