High-energy ion implanter, beam collimator, and beam collimation method

摘要

A beam collimator includes a plurality of lens units that are arranged along a reference trajectory so that a beam collimated to the reference trajectory comes out from an exit of the beam collimator. Each of the plurality of lens units forms a bow-shaped curved gap and is formed such that an angle of a beam traveling direction with respect to the reference trajectory is changed by an electric field generated in the bow-shaped curved gap. A vacant space is provided between one lens unit of the plurality of lens units and a lens unit that is adjacent to the lens unit. The vacant space is directed in a transverse direction of the collimated beam in a cross section that is perpendicular to the reference trajectory. An inner field containing the reference trajectory is connected to an outer field of the plurality of lens units through the vacant space.

主权项

1. A beam collimator of an ion implanter, comprising:
a plurality of acceleration and/or deceleration lens units that are arranged along a reference trajectory so that a beam collimated to the reference trajectory comes out from an exit of the beam collimator; and a vacuum container that surrounds the plurality of lens units, wherein each of the plurality of lens units forms a bow-shaped curved gap defined by at least two electrode sections and is formed such that an angle of a beam traveling direction with respect to the reference trajectory is changed by an electric field generated in the bow-shaped curved gap, wherein an electrode section on one side of one lens unit of the plurality of lens units and an electrode section on the other side of a lens unit adjacent to the lens unit are formed to have the same potential, and wherein a vacant space is provided between one lens unit of the plurality of lens units and a lens unit adjacent to the lens unit, the vacant space being directed in a direction that perpendicularly intersects a beam collimation plane on the reference trajectory, and an inner field containing the reference trajectory communicates, through the vacant space, with an outer field formed between the vacuum container and the plurality of lens units.