Micro-chamber array formed by anisotropic etching e.g. for biotechnology applications

摘要

The array has a number of chambers with a high packing density formed in the surface of a silicon substrate (2) via anisotropic etching of the areas of the substrate between the chamber coated with a thin Au layer (31), overlaid by a functional surface coating (32). The inside walls (10) of the chambers are provided with a second functional surface coating (12), with an opposite effect to the first functional surface coating.