| 发明名称 |
RELEASE LAYER FOR PERMANENT MASTER FOR PATTERNED MEDIA MANUFACTURING |
| 摘要 |
The invention relates to a method of manufacturing a patterned media Ni stamper comprising depositing a perfluorodecyltrichlorosilane release layer. The release layer eliminates bonding at the master-stamper interface. A permanent master for manufacturing a patterned media stamper is also provided.
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| 申请公布号 |
US2010018028(A1) |
申请公布日期 |
2010.01.28 |
| 申请号 |
US20080178416 |
申请日期 |
2008.07.23 |
| 申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
GAUZNER GENNADY;KURATAKA NOBUO;WELLER DIETER KLAUS;FORMATO CHRISTOPHER JOSEPH |
| 分类号 |
B23P17/00 |
主分类号 |
B23P17/00 |
| 代理机构 |
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