| 发明名称 |
BIS(SILYLAMIDEAMINOALKANE) MANGANESE COMPOUND AND METHOD FOR PRODUCING MANGANESE-CONTAINING FILM USING THE MANGANESE COMPOUND |
| 摘要 |
PROBLEM TO BE SOLVED: To provide an industrially suitable manganese compound and a method for producing a manganese-containing film using the manganese compound.SOLUTION: The present invention provides a bis(silylamideaminoalkane) manganese compound represented by formula (1).SELECTED DRAWING: Figure 1 |
| 申请公布号 |
JP2016108247(A) |
申请公布日期 |
2016.06.20 |
| 申请号 |
JP20140243729 |
申请日期 |
2014.12.02 |
| 申请人 |
UBE IND LTD |
发明人 |
KANETO HIROKI;MURAKAMI MASATO |
| 分类号 |
C07F7/10;C23C16/18 |
主分类号 |
C07F7/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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