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发明名称
ETCHING METHOD AND ETCHING EQUIPMENT
摘要
申请公布号
JPH03163825(A)
申请公布日期
1991.07.15
申请号
JP19900042957
申请日期
1990.02.22
申请人
NEC CORP
发明人
KINOSHITA KEIZO
分类号
B01J19/08;C23F4/00;H01L21/302;H01L21/3065
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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