发明名称 COORDINATE MEASURING SYSTEM
摘要 In a two-beam interferometer the influence of changes in wavelength on the measurement of path length is effectively reduced by interposing a translucent, closed, incompressible body in the reference beam or the measurement beam so that when the movable measurement mirror is positioned in a certain way the portions of reference beam and measurement beam passing outside the body are of equal length.
申请公布号 WO9803836(A1) 申请公布日期 1998.01.29
申请号 WO1997DE01222 申请日期 1997.06.17
申请人 LEICA MIKROSKOPIE UND SYSTEME GMBH;RINN, KLAUS 发明人 RINN, KLAUS
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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