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发明名称
DETECTOR SYSTEM OF SECONDARY AND BACKSCATTERED ELECTRONS FOR A SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
EP1673797(B1)
申请公布日期
2009.12.09
申请号
EP20040775184
申请日期
2004.10.06
申请人
POLITECHNIKA WROCLAWSKA
发明人
SLOWKO, WITOLD
分类号
H01J37/28;H01J37/244
主分类号
H01J37/28
代理机构
代理人
主权项
地址
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