发明名称 |
Probe card system |
摘要 |
A semiconductor wafer probe test interface system (2) and method of operating the system. The wafer probe system includes a plurality of cassettes (302) adapted to hold wafer probe test cards (304). The cassettes are loaded into position for testing of semiconductor wafers with a transport assembly system (6). A memory device (316) on the cassette is used to store data regarding usage of the card such as number of wafer touchdowns. A smart controller (220) has the capability to "talk" to the prober and tester.
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申请公布号 |
US5254939(A) |
申请公布日期 |
1993.10.19 |
申请号 |
US19920855763 |
申请日期 |
1992.03.20 |
申请人 |
XANDEX, INC. |
发明人 |
ANDERSON, JAMES C.;PHILLIPS, BRIAN P.;HONEK, CHARLES |
分类号 |
G01R31/28;(IPC1-7):G01R1/02 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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