| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage apparatus for reducing thermal deformation due to drive heat and exposure heat without complicating a configuration and without degrading high-speed responsiveness and accuracy. <P>SOLUTION: The stage apparatus includes a moving body movably provided while holding a substrate, a drive means for driving the moving body and a measurement means for measuring the moving amount of the moving body, and moves the moving body by the drive means on the basis of the output of the measurement means. The moving body is provided with a heat storage material composed of a latent heat storage material or a sensible heat storage material having specific heat equal to or more than 2.0 J/g°C. <P>COPYRIGHT: (C)2009,JPO&INPIT |
