| 摘要 |
PURPOSE: A method for a communication trial test between an equipment and a host in semiconductor manufacturing steps is provided to afford a GUI(Graphic User Interface) environment, to check a state of message transmission and reception using the GUI, and to give a recording method. CONSTITUTION: An SECS(Semi Equipment Communications Standard) message is defined and stored in an SECS message library file. A communication test part opens(S400) the SECS message library file, and sets up(S402) communication between a host and an equipment. The communication test part judges(S404) the message in the host. If the message is received, the communication test part checks(S406) the received message, and stores(S408) the message in a history file. The test part estimates(S410) whether the received message needs a reply or not. If reply is required, S404 step is performed again. If not, the message is stocked(S412) in the history file. The host sends the message to the equipment, and the test part proceeds S404 step. After the judgement(S404), if the message is transmission message, the test part executes steps from S412.
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