发明名称 INTERCONNECT STRUCTURES WITH BOND-PADS AND METHODS OF FORMING BUMP SITES ON BOND-PADS
摘要 <p>Microelectronic workpieces that have bump sites over bond-pads and methods of fabricating such bump sites. One embodiment of such a workpiece, for example, includes a substrate having a plurality of microelectronic dies comprising integrated circuitry and bond-pads, such as copper bond-pads, electrically coupled to the integrated circuitry. The workpiece further includes (a) a dielectric structure having a plurality of openings with sidewalls projecting from corresponding bond-pads, and (b) a plurality of caps over corresponding bond-pads. The individual caps can include a discrete portion of a barrier layer attached to the bond-pads and the sidewalls of the openings, and a discrete portion of a cap layer on the barrier layer. The caps are electrically isolated from each other and self-aligned with corresponding bond-pads without forming a mask layer over the cap layer.</p>
申请公布号 KR20070096016(A) 申请公布日期 2007.10.01
申请号 KR20077018441 申请日期 2007.08.10
申请人 MICRON TECHNOLOGY, INC. 发明人 TANG SANH D.;TUTTLE MARK E.;COOK KEITH R.
分类号 H01L23/485 主分类号 H01L23/485
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